The thin film element and its manufacturing method supermagnetostrictive

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PROBLEM TO BE SOLVED : To obtain a super-magnetostrictive thin film element showing a high magnetostrictive characteristic of ≥700 ppm in a low magnetic field (80k A/m) and having low coercive force (≤8k A/m). SOLUTION : In the super-magnetostrictive thin film element constituted of forming a thin film consisting of a super-magnetostrictive material on a substrate, the thin film consists of a super-magnetostrictive material of a vapor-grown Rx(Fe1-yCoy)100-x(provided that R is a rare earth element containing Y) group, and the composition consists of an R amount x of 30≤x≤45 and a Co amount ratio y of 0.2≤y (preferably 0.3≤y≤0.9). During the formation of a thin film by vapor phase growth or after the formation of the thin film, the thin film is thermally treated at 200 to 350 °C. COPYRIGHT : (C)2006, JPO&NCIPI