Rare earth-containing oxide member

文件类型：PDF文档
文件大小：89K
The present invention is a rare earth-containing oxide member comprising a substrate comprising at least one element selected from group consisting of C, Si, Al, Ni, Ti, Fe, Mo, Ta and W, or an alloy comprising at least one element selected from group consisting of Si, Al, Ni, Ti, Fe, Mo, Ta and W; and a compound oxide laminated to the substrate, the compound oxide comprising a rare earth element (inclusive of Y) and Al and having a composition of 40 to 90 mole % of rare earth oxide and 10 to 60 mole % of Al2O3, based on the total amount of the oxides. The present invention also provides a heat-treating jig using such a rare earth-containing oxide member wherein the total amount of iron family elements, alkali metal elements and alkaline earth metal elements is not greater than 20 ppm.