METHOD FOR MANUFACTURING ZnO VAPOR DEPOSITION MATERIAL

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PROBLEM TO BE SOLVED : To manufacture a ZnO vapor deposition material which is excellent in composition uniformity by suppressing the segregation of rare earth oxides containing one element selected the rare earth group to be added to ZnO raw material powder, and to manufacture a ZnO vapor deposition material capable of obtaining a ZnO film uniform in deposition film composition. SOLUTION : The first granulated powder 14 is produced from the compound powder 13 having the average grain size of 0.05-2 μm obtained by using mixed powder of ZnO powder 11 and rare earth oxide powder 12 containing one element selected from the rare earth group, and executing the mechanical alloying treatment. Alternatively, the compound powder 13 is calcinated and disintegrated to form the second granulated powder 19 from compound calcinated powder 18 subjected to the promoted solid solution, and the ZnO vapor deposition material 16 or 22 consisting of ZnO sintered compact containing rare earth is formed through molding and sintering. COPYRIGHT : (C)2010, JPO&INPIT