METHOD FOR MANUFACTURING ZnO VAPOR DEPOSITION MATERIAL

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PROBLEM TO BE SOLVED : To provide a ZnO vapor deposition material excellent in compositional uniformly by suppressing the segregation of rare axide containing one element selected from the rare earth element in a ZnO sintered compact to be used for the vapor deposition material. SOLUTION : The surface of ZnO powders 11 is coated with rare earth oxide 13 containing one element selected from the rare earth elements to obtain a grannule 14. A first granulated powder 15 or the second granutated 21 is made by using the granule 14 or the calcined powder obtained by crushing the granule after calcination and then, the ZnO vapor deposition material 17 comprising a ZnO sintered compact is produced through molding and sintering. COPYRIGHT : (C)2010, JPO&INPIT