METHOD FOR TREATING IMPURE RARE GAS

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PROBLEM TO BE SOLVED : To efficiently and inexpensively recover a rare gas such as neon, xenon from an impure rare gas as a gas to be treated containing the rare gas such as neon, xenon and impurities of a halogen compound, hydrogen and hydrocarbon. SOLUTION : The gas to be treated containing the rare gas such as neon, xenon and the halogen compound, hydrogen and hydrocarbon as impurities is sent to halogen removing columns 4a (4b) and is reacted with a reacting agent such as iron oxide to remove the halogen compound and then oxygen is added into the gas to be treated and introduced into an oxidation column 6 to oxidize hydrogen and hydrocarbon using an oxidation catalyst to obtain a gas to be treated containing water and carbon dioxide and the gas to be treated is sent to dehydration columns 11a (11b) filled with zeolite or the like to remove water. COPYRIGHT : (C)2010, JPO&INPIT