氮化铝系粉末及其制造方法

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An object of the present invention is to provide aluminum nitride-based powder, 1) the powder containing few fine particles which cannot be removed, 2) the powder being highly filled in high molecular materials, and 3) the powder having high thermal conductivity. The present invention is directed to aluminum nitride-based powder composed of aluminum nitride-based particles, wherein (1) the powder has an average particle diameter D50 of 15-200 μm, (2) the number of particle having a particle diameter of 5 μm or less is not more than 60% for the number of particle of all particles in the powder, (3) the powder has a content of alkaline earth metal element and rare-earth element of not more than 0.1% by weight, (4) the powder has an oxygen content of not more than 0.5% by weight, (5) the powder has a silicon content of not more than 1000 ppm by weight, and an iron content of not more than 1000ppm by weight.