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Disclosed is a reaction device that includes a metal substrate and an R2O3 film. The R2O3 film has a crystal structure structured with at least one rare earth element R selected from the group including Sc, Y, La, Gd, Dy, Ho, Er, Tm, and Lu. The R2O3 film is formed on at least a portion of a surface of the metal substrate where an insulation property is needed.