METHOD OF MANUFACTURING METALLIC EARTH CONDUCTOR

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PROBLEM TO BE SOLVED : To provide inexpensive method of manufacturing a metallic earth conductor by which the occurrence of minute projections, such as flash burrs and burrs, can be prevented and which can quickly adapt to design changes. SOLUTION : The method of manufacturing a metallic earth conductor is a method of manufacturing a strip-shaped metallic earth conductor 10 in which, in order to ground a mounting platform 3 of a treatment object 2 moving in a vacuum chamber 1 of a thin-film deposition system, one end side is connected to the mounting platform 3 and which is deformable following the movement of the mounting platform 3. The method is characterized in that : masking is applied to a metal sheet 21 according to the general profile when the strip-shaped metallic earth conductor 10 is in a flat state; and etching is carried out in such a way that, while leaving the general profile of the metallic earth conductor 10, the other portions are removed. COPYRIGHT : (C)2008, JPO&INPIT