ALUMINUM NITRIDE CERAMIC, SEMICONDUCTOR MANUFACTURING MEMBER, AND MANUFACTURING METHOD FOR ALUMINU

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An aluminum nitride ceramic including aluminum nitride grains and grain boundary phases comprises a grain boundary phase-rich layer including more amount of the grain boundary phases in a surface layer of the aluminum nitride ceramic than in an inside of the aluminum nitride ceramic. The grain boundary phases in the grain boundary phase-rich layer include at least one of rare earth element and alkali earth element.