Method and apparatus for growth of single-crystal rare-earth oxides, nitrides, and phosphides

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Structure and method for growing crystalline superlattice rare earth oxides, rare earth nitrides and rare earth phosphides and ternary rare-earth compounds are disclosed. The structure includes a superlattice having a plurality of layers that forming a plurality of repeating units. At least one the layers in the repeating unit is an active layer with at least one species of rare earth ion.