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The purpose of the invention is heavy metal oxide thin films and their applications. These thin films will serve to produce doped and undoped planar wave-guides and planar lightwave circuit (PLC) for passive and active optical devices (amplifier, laser, filter, multiplexer, attenuators and . . . ). These thin films present low loss, good chemical and thermal stability and wide optical transmission window, high solubility of all rare earth ions and transition metals ions . . . . They can be deposited on different substrates.