Thin-film lamination, and actuator device, filter device, ferroelectric memory, and optical defl

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A thin-film lamination includes : a monocrystal substrate; an intermediate layer having zirconia as a main constituent produced in an epitaxial growth manner on the monocrystal substrate; a C-rare earth structure film comprising oxide having a C-rare earth crystal structure produced on the intermediate layer in an epitaxial growth manner; and a simple perovskite structure film comprising a metal oxide of a crystal structure having simple perovskite lattices produced on the C-rare earth structure film in an epitaxial growth manner.