POWDER FOR FILM FORMATION AND MATERIAL FOR FILM FORMATION

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PROBLEM TO BE SOLVED : To provide a powder for film formation, the powder being dense and having an excellent corrosion resistance. SOLUTION : The powder for film formation according to the invention contains an oxyfluoride (Ln-O-F) of a rare earth element. The average particle diameter (D50) of this powder is from 0.1 μm to 10 μm, and the volume of pores having a diameter of 10 μm or less as determined by a mercury intrusion method is from 0.1 to 0.5 cm3/g. In an X-ray diffraction measurement of this powder using a Cu-K α ray or Cu-K α1 ray of a powder, the ratio of the maximum peak intensity (S0) of an oxide of a rare earth element (LnxOy) as observed within the range of 2θ=20-40 degree to the maximum intensity (S1) of the oxyfluoride (Ln-O-F) of the rare earth element as observed within the same range, namely (S0/S1) is 1.0 or less. SELECTED DRAWING : None COPYRIGHT : (C)2017, JPO&INPIT