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ALUMINUM NITRIDE-SINTERED BODY AND METHOD FOR PRODUCING THE SAME

2025-06-17 16:533730下载
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PROBLEM TO BE SOLVED : To provide a method for producing an aluminum nitride-sintered body, capable of : producing the desired aluminum nitride-sintered body; producing an aluminum nitride green sheet from an aqueous slurry; reducing the amount of an organic solvent used; and furthermore reducing an environmental load. SOLUTION : A method of this invention for producing an aluminum nitride-sintered body includes : a primary mixing step of mixing a raw material powder comprising silicon-containing oxide-coated aluminum nitride particles and a sintering aid powder that contains a rare-earth element, with water to obtain a raw material slurry; a secondary mixing step of mixing the raw material slurry with a binder solution to obtain a mixture, and then subjecting the mixture to filtration to obtain a mixed slurry; a molding step of molding the mixed slurry to obtain an aluminum nitride-molded body; a degreasing step of heating the aluminum nitride-molded body at the temperature lower than 600°C under an oxidized gas atmosphere to obtain an aluminum nitride-degreased body; and a sintering step of sintering the aluminum nitride-degreased body to obtain the aluminum nitride-sintered body. SELECTED DRAWING : None COPYRIGHT : (C)2022, JPO&INPIT


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