METHOD OF MANUFACTURING TRANSPARENT CONDUCTIVE FILM, TRANSPARENT CONDUCTIVE FILM OBTAINED AND TRANS

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PROBLEM TO BE SOLVED : To provide a method of manufacturing a highly conductive and inexpensive transparent conductive film using a tungsten oxide or a composite tungsten oxide, to provide a transparent conductive film obtained, to provide a conductive member employing the same, to provide an electronic display device, and to provide a solar cell. SOLUTION : In this method of manufacturing the transparent conductive film containing the tungsten oxide (A) represented by general formula (1) WyOz, and/or the composite tungsten oxide (B) represented by general formula (2) MxWyOz, the transparent conductive film is formed on a transparent substrate by an aerosol deposition method using the tungsten oxide having an average particle diameter of 0.05-5.0 μm and a maximum particle diameter of not more than 15.0 μm and/or the composite tungsten oxide as raw material powder. Where, W is tungsten, O is oxygen, and z, y satisfy a relation of 2.2≤z/y≤2.999. M element is one or more kinds of element selected from H, He, alkali metals, alkali earth metals, rare earth elements, Zr, Cr, Mn, Fe, ..., and x, z, y satisfy relations of 0.001≤x/y≤1, and 2.2≤z/y≤3.0. The transparent conductive film has a conductivity less than 5.0×10-3 Ω/square, and a transparent conductive member, a display device and a solar cell can be inexpensively manufactured by incorporating it. COPYRIGHT : (C)2010, JPO&INPIT