ALUMINUM OXIDE SINTERED PRODUCT AND METHOD FOR PRODUCING THE SAME

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PURPOSE : An aluminum oxide sintered body and a manufacturing method thereof are provided to improve corrosion resistance of the sintered boy and to adjust volume resistivity of the aluminum oxide sintered body.CONSTITUTION : An aluminum oxide sintered body includes a phase containing rare earth materials and fluorine existed between particles of aluminum oxide. The aluminum oxide sintered body includes the phase formed according to hills of the particles of the aluminum oxide as a main component. The volume resistivity produced from a current value is 1×10 ~1×10 Ω·cm. The rare earth material is yttrium, lanthanum and ytterbium. The content of the rare earth material is 0.1 ~ 20 weight%%. The content of the fluorine is 0.05 weight%% ~5 weight%%.COPYRIGHT KIPO 2010