METHOD OF MANUFACTURING VALVE METAL COMPOSITE FOIL

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PROBLEM TO BE SOLVED : To provide a method of manufacturing an electrode foil for an electrolytic capacitor of a reduced cost, which is suitable for making a multilayer solid electrolytic capacitor and has a higher capacity density than an etching Al foil and has an equivalent electrode resistance and further reduces consumptions of Ta and Nb which are expensive rare metals.SOLUTION : A method of manufacturing a valve metal composite electrode foil comprises the steps of : forming compact layers (2) consisting of valve metals such as Ta, Ta alloy, Nb or Nb alloy at both sides of a collector layer (1) consisting of a copper foil; forming at one or both of the obtained compact layers (2) an alloy thin film (3) in which the valve metals and heterocomponents incompatible with the valve metals are uniformly distributed in a range of particle sizes of 1 nm to 1 μm; performing a particle adjustment for carrying out a particle growth of the valve metals and the heterocomponents in the alloy thin film (3) by a heat treatment; and thereafter obtaining a porous layer (5) of the valve metals by removing the heterocomponents.COPYRIGHT : (C)2008, JPO&INPIT