MANUFACTURING METHOD OF ELECTRON SOURCE

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PROBLEM TO BE SOLVED : To stably provide an electron source capable of maintaining high reliability even in a long-term operation. SOLUTION : In the electron source, the surface of an electron emission material composed of hexaboride of rare earth elements other than an electron emission section is coated with carbon. In the manufacturing method of the electron source, the electron emission material is heated in decompression at 10Pa or less as a pre-treatment of applying the carbon. Preferably, the pre-treatment is performed in a range of 1×10-2-10Pa and 1300-1600°C. More preferably, after the pre-treatment is applied to the electron emission material, the electron emission material is coated with the carbon without cooling to 1000°C or lower. COPYRIGHT : (C)2006, JPO&NCIPI