APPARATUS AND METHOD FOR PRODUCING PLASMA-TREATED SHEET

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PROBLEM TO BE SOLVED : To provide an apparatus for producing a plasma-treated sheet in which broadening of discharge, short-circuit, arc discharge, and performance-reducing phenomena of gas atmosphere are hardly caused.SOLUTION : The apparatus for producing the plasma-treated sheet has facing discharge electrode 5 and counter electrode 3, and a sheet passage in which the sheet 6 continuously traveling in a plasma treating region formed by the discharge between the discharge electrode 5 and the counter electrode 3 passes. The surface of at least one electrode of the discharge electrode 5 and the counter electrode 3 is covered with a dielectric 2. The apparatus also has a plasma chamber 10 substantially shielding the plasma treating region from the external world, and the plasma chamber 10 has a gas-feeding port 13 for feeding the gas containing a rare gas element into the chamber, and an inlet 11 and outlet 12 of the sheet passage. A gas chamber 32 having a pressurized gas-feeding port 31 for feeding the pressurized gas to the passage at the vicinity of the inlet 11 of the passage is installed in the outside of the inlet 11 of the passage.COPYRIGHT : (C)2007, JPO&INPIT